OCD增強：納米片內墊片壓痕的光譜幹涉測量的實施與驗證
D. Schmidt、C. Durfee、S. Pancharatnam、M. Medikonda、A. Greene、J. Frougier、A. Cepler、G. Belkin、D. Shafir、R. Koret、R. Shtainman、I. turvets、S. Wolfling

由EUV單曝光模式圖案化14nm半間距BEOL層的散射溶液
薩揚坦·達斯，喬伊·洪，桑迪普·霍爾德，羅伊·科瑞特，伊戈爾·特羅維茨，安妮-洛爾·查利，菲利普·萊雷

用於堆疊納米片器件製造的在線拉曼光譜
D. Schmidt，C. Durfee，J.Li，N.Loubet，L. Neeman，N.Meir，J.Ofek，Y. Oreen，D. Fishman

光譜學:納米片晶體管腔蝕臨界尺寸測量的新途徑
J.Bogdanowicz，Y.Noiki，K.Kenis，Y.Muraki，T.Nuytten，S. Subergeant，A. Franquet，V. Spampinato，T. Conard，I. Hoflijk，J. Meersschaut，N.Claessens，A.Moussa，D.Van Den Heuvel，J. Hung，R. Koret，A.-L。查理，P. Leray，

結合基於RCWA的模型和TLM算法的超大螺距和深度結構的光譜反射測量
Ilya Osherov，Adam Michal Billowicz，Yinon Katz，Kobi Barkan，Igor Tacrovets，Ronny Haupt

SiGe壓痕過程控製的發展，以實現堆疊納米片場效應晶體管技術万博mantex体育入口
Dexin Kong，Daniel Schmidt，Mary Breton，Abraham Arceo de LaPeña，Julien Frougier，Andrew Greene，Jingyun Zhang，Veeraraghavan Basker，Nicolas Loubet，Ishtiaq Ahsan，Aron Celler，Mark Klare，Marjorie Cheng，Roy Koret，Igor Tovets

血漿鹵代A-C：H作為氧化鈦ASD的生長抑製層
M. Krishtab，J. Hung，R. Koret，I. Tacrovets，K. Shah，S. Rangarajan，L.Warad，V. Zhang，R. AmeloT，S. Armini

先進的機器學習生態係統來解決HVM光學計量要求
Padraig Timoney，Roma Luthra，Haibo Liu，Paul Isbester，Avi Levy，Michael Shifrin，Barak Bructolzz，Eylon Rabinovich，Ariel Broitman，Eitan Rothstein，Ran Yacoby，Iona Yacoby，Iona Yacoby，Ionga Kubinovich，Yongha Kim，Moerer Shlagman，Barak Ben-Nahum，Barak Ben-Nahum，Marina Zolkin，Igor Toid

用散射測定法和機器學習測量EUV通孔的局部CD均勻性
Dexin Kong, Daniel Schmidt, Jennifer Church, Chi-Chun Liu, Mary Breton, Cody Murray, Eric Miller, Luciana Meli, John Sporre, Nelson Felix, Ishtiaq Ahsan, Aron J. Cepler, Marjorie Cheng, Roy Koret, Igor turrovets

用於自對準半鑲嵌的釕直接蝕刻散射溶液
Paolillo, Sara, Moussa, Alain, Murdoch, Gayle, Lazzarino, Frederic, Charley, Anne-Laure等。

改進先進鑄造製造計量艦隊kpi
蘇珊養殖，班尼Vilge，Marjorie Cheng，Charles Kang，Darren Zingerman，Kevin Drayton，Naren Yellai，Matthew Sendelbach，Taher Kagalwala，Padraig Timoney，Ronald Fiege，Jason Emans，Timothy Hughes，Alexander Elia，Alok Vaid

薄金屬的先進光學建模，提高散射模型的魯棒性和準確性
Carsten Hartig1，亞當烏雷迪奇12，Dmitriy Likhachev1，Ines Altendorf1，AndreasReichel1，Martin Weisheit1

區域選擇性沉積過程表征的散射和AFM測量組合
Mohamed Saib, Alain Moussa, Anne-Laure Charley, Philippe Leray, Joey Hung, Roy Koret, Igor Turovets, Avron Ger, Shaoren Deng, Andrea Illiberi, Jan Willem Maes, Gabriel Woodworth, Michael Strauss

基於OCD的機器學習預測電氣性能
Sayantan Das, Joey Hung, Sandip Halder, Guillaume Schelcher, Roy Koret, Igor turrovets, Mohamed Saib, Anne-Laure Charley, Matthew Sandelbach, Avron Ger, Philippe Leray

使用散射測定法和le-XRF的機器學習和混合計量檢測銅線中的空隙
Dexin Kong, Koichi Motoyama, Abraham Arceo de la peña，槐黃，Brock Mendoza, Mary Breton, Gangadhara Raja Muthinti, Hosadurga Shobha, Liying Jiang, Juntao Li, James J. Demarest, John Gaudiello, Gauri Karve, Aron Cepler, Matthew Sendelbach, Susan Emans, Paul Isbester, Kavita Shah, Shay Wolfing, Avron Ger

基於XPS的全結構晶體管過程監控
Jusang Lee, Ganesh Subramanian, Manasa Medikonda, Hossam Lazkani, Judson Holt, Churamani Gaire, Paul isbest, Mark Klare

基於散射學的機器學習在多電子束光刻控製中的應用
Nivea Figueiro，Francisco Sanchez，Rov Koret，Michael Shifrin，Yoav Etzioni，Shay Wolfling，Matthew Sendelbach，Yoann Blancquaert，Thibault Labbaye，Guido Roymaker，Jonathan Pradelles，Lucie Mouerier，Stephane Rey，Laurent痛苦

麵向大批量製造計量挑戰的機器學習實現
Padraig Timoney, Taher Kagalwala, Edward Reis, Houssam Lazkani, Jonathan Hurley, Haibo Liu, Charles Kang, Paul isbest, Naren Yellai, Michael Shifrin, Yoav Etzioni

基於上下文的虛擬計量
Peter Ebersbach，Adam M. Urbanowicz，Dmitriy Likhachev，Carsten Hartig，Michael Shifrin

基於掩模設計的EUV圖案器件結構粗糙度量化的整體測量靈敏度研究
Shimon Levi, Ishai Swrtsband, Vladislav Kaplan, Ilan Englard, Kurt Ronse, Bogumila Kutrzeba-Kotowska, Dai Gaoliang, Frank Scholze, Kenslea Anne, Hayley Johanesen, Laurens Kwakman, Igor Turovets, Maxim Rabinovitch, Sven Krannich, Nikolai Kasper, Brid Connolly, Romy Wende, Markus Bender

散射物 - 全麵（GAA）技術支持万博mantex体育入口
安妮勞瑞斯漢斯·佩佩斯1，北約堀池1，菲利夫·塞拉巴赫2，尼維亞蒂雅·羅斯3，羅伊·普羅德·4，薩伊·沃爾夫嶺4，澳大利亞州克裏斯·哈拉哈5，傑森·阿拉伯

基於機器學習的非選擇性SiGe結節缺陷的散射在線表征
Dexin Kong, Robin Chao, Mary Breton, Liu Chi-chun, Gangadhara Raja Muthinti, Soon-cheon Seo, Nicolas J. Loubet, Pietro Montanini, John Gaudiello, Veeraraghavan Basker, Aron Cepler, Susan Ng-Emans, Matthew Sendelbach, Itzik Kaplan, Gilad Barak, Daniel Schmidt, Julien Frougier

先進混合計量方法在納米壓印光刻中的應用
Ilya Osherov a, Limor Issacharoff a, Oram Gedalia a, Koichi Wakamoto b, Matthew Sendelbach c, Masafumi Asano d

多電子束光刻散射控製
Yoann Blancquaert A，Nivea Figueiro B，Thibault Labbaye A，Francisco Sanchez B，Stephane Heraud B，Roy Koret C，Matthew Sendelbach D，RALF Michel B，Shay Wolfling C，Stephane Rey A，Laurent疼痛A

多通道柵四周(GAA)器件工藝集成的材料表征
Gangadhara Raja Muthitti A，尼古拉斯路易A，亞伯拉罕A. de laPeñaa，juntao li a，邁克爾A. Guillorn A，Tenko Yamashita A，Sivananda Kanakasabathy A，John Gaudiello A，Aron J. Celpler B，MatthewSendelbach B，Susan emans B，Shay Wolfling C，Avon Ger C，Daniel Kandel C，Roy Koret C，Wei Ti Lee D，Peter Gin E，Kevin Matney E，Matthew Wormington E

基於混合計量和機器學習的電測試預測
Mary Breton A，Robin Chao A，Gangadhara Raja Muthitti A，亞伯拉罕A. de laPeñaa，jacques simon a，aron J. Celper B，Matthew Sendelbach B，John Gaudiello A，Hao Tang A，Susan Emans B，Michael Shifrin C.，yoav etzioni c，ronen urenski c，wei ti lee d

使用多通道OCD的3D結構複雜計量
Taher Kagalwalaa，Sridhar Mahendrakara，Alok Vaida，Paul K. Isbesterb，Aron Ceplerb，Charles Kangb，Naren Yellaib，Matthew Sendelbachb，Mihael Koc，Ovadia Ilgayevc，Yinon Katzc，Lilach Tamamc，Ilace Osherovc

BEOL過程控製的混合散射測量測量
Padraig Timoneya *，Alok Vaida Byung Cheol Kangb，海濱Liub，Paul Isbesterb，Marjorie Chengb，Susan Ng-Emansb，Naren Yellaib，Matt Sendelbachb，Roy Koretc，Oram Gedaliac

用於散射臨界尺寸測量的TiN金屬硬掩膜的先進光學建模
Peter Ebersbacha，Adam M. Urbanoyzb，Dmitriy Likhacheva，Carsten Hartiga

散射物 - 全麵（GAA）技術支持万博mantex体育入口
Anne-Laure Charley 1, Hans Mertens 1, Naoto Horiguchi 1, philippe Leray 1, Matthew Sendelbach 2, Nivea Figueiró 3, Roy Koret 4, Shay Wolfling 4, Avron Ger 4, Christopher Hakala 5, Jason Arjavac 5