SIMS二級離子質譜法
諾瓦 Metrion® utilizes二級離子質譜(SIMS)技術toproprovideInformation,其万博mantex体育入口他在線計量係統無法提供。 METRION provides direct, in-line measurement of the chemical composition with respect to depth at high resolution and data density. METRION can measure multiple species simultaneously through the entire film stack on a whole, 300mm wafer. Process automation with built-in film analysis and recipe management makes the system easy to use and shorten the time to data. Bringing SIMS in-line prevents scrap, reduces重工,andenables更緊密的SpcbyDeliveringTime敏感信息可以監視和控製HVM工作流。
亮點和好處
- 直接的,在線測量高深度分辨率和數據密度下的組合曲線
- 內置電影分析和食譜管理
- 大量製造的全工廠自動化
- 無汙染的生產
- 整個Wafersims消除了樣品準備
- 通過降低廢料和提高產量通過快速投資回報率
- 關鍵用例包括:汙染控製,進程預防,反應堆匹配,均勻性控製